Full-field surface measurement technique for optical metrology applications

Kuek Hong Wee; Ping Shum; Tian Cher Chye; Lai Wenn Jing

doi:10.1117/12.446619

29 October 2001 Full-field surface measurement technique for optical metrology applications

Kuek Hong Wee, Ping Shum, Tian Cher Chye, Lai Wenn Jing

Proceedings Volume 4595, Photonic Systems and Applications; (2001) https://doi.org/10.1117/12.446619
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore

Abstract

The Shape of an object can be determined by analyzing the distortion of optical grating projected onto it. Many available approaches could be used for this kind of analysis, however most of them require massive computation such as Fourier transformation. Alternatively, direct image processing could be used to give an efficient and accurate result. The profile of the object can be expressed in terms of wire-frame or texture mapped model.

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Kuek Hong Wee, Ping Shum, Tian Cher Chye, and Lai Wenn Jing "Full-field surface measurement technique for optical metrology applications", Proc. SPIE 4595, Photonic Systems and Applications, (29 October 2001); https://doi.org/10.1117/12.446619

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KEYWORDS

3D image processing

3D metrology

Cameras

Image processing

Fringe analysis

Light sources

CCD cameras

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