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PROCEEDINGS VOLUME 4601
INTERNATIONAL SYMPOSIUM ON OPTOELECTONICS AND MICROELECTRONICS | 7-10 NOVEMBER 2001
Micromachining and Microfabrication Process Technology and Devices
Editor(s): Norman C. Tien, Qing-An Huang
Editor Affiliations +
IN THIS VOLUME
9 Sessions, 75 Papers, 0 Presentations
Sensors II  (7)
Micromachining I  (5)
Optical Devices  (6)
Actuation  (6)
Poster Session  (31)
Micromachining II  (5)
Sensors I  (6)
Modeling  (5)
RF Applications  (4)
INTERNATIONAL SYMPOSIUM ON OPTOELECTONICS AND MICROELECTRONICS
7-10 November 2001
Nanjing, China
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Sensors II
Label-free DNA hybridization detection with molecular beacon immobilized in photopolymerized acrylamide gel microarray Paper
Hong Wang, Jiong Li, Quanjun Liu, Heping Liu, Zuhong Lu, Jijun Zhu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444684
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Micromachining I
Comparison of the silicon three main crystal planes' surface roughness after etching in aqueous potassium hydroxide solutions Paper
Yanfeng Jiang, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444695
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Optical Devices
Fiber optic choline biosensor Paper
Hong Wang, Xiaojian Cao, Ke Jia, Xueting Chai, Hua Lu, Zuhong Lu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444715
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Sensors II
Position sensor in micro-electro-mechanical systems using a self-mixing laser diode Paper
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444733
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Actuation
Design of thin-film-based microgrippers Paper
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444741
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Poster Session
Preparation and photoluminescence of nanowire array and films of cadmium sulfide by electrodepositing in organic solvent Paper
Xin Ju, Liangqiang Peng
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444758
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Micromachining II
Polymer and glass etching by ArF and XeCl excimer lasers Paper
Qihong Lou, Lin Zhang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444685
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Actuation
Characterization and MEMS application of sputtered TiNi shape memory alloy thin films Paper
Hejun Du, Yongqing Fu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444686
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Poster Session
Mechanics characteristics of an electrostatic optical switch Paper
Yuan Luo, Yi Zhang, Shanglian Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444687
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Sensors II
Metallic oxide semiconductor field effect-transistor array-compound-type gas chemical microsensor Paper
Huang-ping Yan, Jun Guo, Yong-jian Feng
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444688
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Optical Devices
Magnetically actuated MEMS variable optical attenuator Paper
Wenjun Li, Xiaolin Zhao, Bingchu Cai, Guangya Zhou, Mingsheng Zhang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444689
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Poster Session
Modeling and fabrication of micro 3K-2-type planetary gear reducer utilizing SU-8 photoresist as alternative LIGA technology Paper
Weiping Zhang, Wenyuan Chen, Di Chen, Xiaomei Chen, Xiaosheng Wu, Zhengfu Xu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444690
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Micromachining I
Atomic force microscope using a diamond tip: a tool for micro/nanomachining on single-crystal silicon surface Paper
Qingliang Zhao, Tao Sun, Ying-Chun Liang, Shen Dong, Mingjun Chen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444691
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Poster Session
High-aspect-ratio PMMA microstructures fabricated by RIE Paper
Aibin Yu, Guifu Ding, Chunsheng Yang, Changmin Li, Haiping Mao, Zhiping Ni
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444692
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Sensors I
Surface-micromachined double-sided touch mode capacitive pressure sensor Paper
Gaopan Xu, Guangwen Chen, Guoqing Hu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444693
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Modeling
Experiments and a new model on damping in rare air Paper
Hao Yin, Minhang Bao, Heng Yang, Shaoqun Shen, Bin Xiong
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444694
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Sensors I
Phase detection scheme of vibratory gyroscope by 2D driving operation Paper
Heng Yang, Minhang Bao, Hao Yin, Shaoqun Shen, Bin Xiong
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444696
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Poster Session
Preparation and performance of silicon microchannel plate Paper
Qingduo Duanmu, Jingquan Tian, Ye Li, Tangren Dan, Yaohua Lu, Delong Jiang, Lichen Fu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444697
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Micromachining II
Fabrication of high-aspect-ratio microstructure on metallic substrate using SU-8 resist Paper
Jingquan Liu, Bingchu Cai, Jun Zhu, Guipu Ding, Xiaolin Zhao, Chunsheng Yang, Di Chen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444698
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Actuation
Hydrogen-induced actuation: a new active mechanism for MEMS Paper
Yi Zhang, Guifu Ding, Chunsheng Yang, Aibin Yu, Bingchu Cai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444699
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RF Applications
Surface-acoustic-wave device-based wireless measurement platform for sensors Paper
Han Tao, Wenkang Shi
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444700
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Poster Session
Application of liquid crystal display for binary optics Paper
Huijuan Zhang, Zhaoqi Wang, Hongli Liu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444701
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Modeling
Numerical modeling of a SiN beam resonant pressure sensor Paper
Deyong Chen, Dafu Cui, Li Wang, Zhongyao Yu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444702
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Poster Session
Design and simulation of a multifinger micromechanical silicon accelerometer Paper
Jing-Xin Dong, Jun-Hua Qin
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444703
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Micromachining II
DEM microfabrication technique and its applications in bioscience and microfluidic systems Paper
Di Chen, Fan Yang, Min Tang, Yigui Li, Jun Zhu, Dacheng Zhang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444704
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Poster Session
Numerical analysis of a composite diaphragm microactuator Paper
Jian Chen, Bingchu Cai, Li Wang, Dong Xu, Xiulan Cheng
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444705
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Electrochemical studies of electrodeposition of nickel for LIGA microstructures Paper
Guifu Ding, Yi Zhang, Jingquan Liu, Xiaolin Zhao, Bingchu Cai, Tianhui Shen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444706
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Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results Paper
Guifu Ding, Yi Zhang, Chunsheng Yang, Xiaolin Zhao, Aibin Yu, Tianhui Shen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444707
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Modeling
Study of signal process of gas sensor array with nonlinear principal component analysis Paper
Guangfen Wei, Zhenan Tang, Jun Yu, Philip C.H. Chan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444708
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Sensors II
Measurement of heat capacity of SnO2 thin films using microhotplate Paper
Jun Yu, Zhenan Tang, Guangfen Wei, Philip C.H. Chan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444709
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Modeling
Adaptive modeling of MEMS system-level simulation based on evolutionary computation Paper
Daoheng Sun, Chengzhi Wang, Wenwang Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444710
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Sensors II
Absorption and emission properties of F-center-OH- defect pairs in cesium halides Paper
Chunyang Kong, Y. Ma, M. D. Dong, Wanlu Wang, Kejun Liao, J. Xu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444711
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Optical Devices
LD array end-pumped Nd:YVO4 laser with an optical isolator Paper
Yuanqing Huang, Yongming Chen, Limiao Zhu, Jinghua Zeng
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444712
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Micromachining I
Gray-scale mask fabrication system for diffractive micro-optics Paper
Shengyi Li, Zhe-hui Lin, Bing Luo, Yi-fan Dai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444713
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Actuation
Driving property of twist-roller friction mechanism in ultraprecision positioning system Paper
Bing Luo, Zhe-hui Lin, Shengyi Li, Yi-fan Dai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444714
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Structural optimization of NiTi/Si diaphragm used in micropumps Paper
Li Wang, Jian Chen, Dong Xu, Bingchu Cai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444716
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Poster Session
Development of microflowmeters and microlenses using a new 3D microfabrication-DEM technique Paper
Di Chen, Min Tang, Zhimin Wang, Changmin Li, Zhiping Ni, Di Zhou
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444717
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Micromachining I
Effect of annealing on mechanical and optical properties of in-situ doped SiC thin films Paper
Hoa Thi Mai Pham, Charles R. de Boer, Cassan C. C. Visser, Pasqualina M. Sarro
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444718
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Sensors I
Novel silicon-micromachined gyroscope with high Q at atmosphere Paper
Bin Xiong, Yuelin Wang, Lufeng Che, Weiyuan Wang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444719
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Optical Devices
MEMS-based variable optical attenuator Paper
Xuhan Dai, Xiaolin Zhao, Wenjun Li, Bingchu Cai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444720
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Poster Session
Forces balance of micromachined accelerometer Paper
Yulie Wu, Xuezhong Wu, Shengyi Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444721
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Parallel manipulator for micro-assembly and micromachining Paper
Xuezhong Wu, Yulie Wu, Shengyi Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444722
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Sensors II
Novel CMOS two-dimensional integrated gas flow sensor Paper
Zhao-Yong Zhang, Ming Qin, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444723
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Sensors I
Capacitive humidity sensor in CMOS technology Paper
Xian-Wei Yan, Ming Qin, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444724
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RF Applications
Micromachined variable capacitors with laterally positioned suspended plates Paper
Qingquan Liu, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444725
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Poster Session
Capacitance-coupling micromechanical filter Paper
Binking Zhang, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444726
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Sensors I
Integrated pressure-sensing microsystem by CMOS IC technology for barometal applications Paper
Minxin Zhou, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444727
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Micromachining II
Study of the novel technique of laser shocking fine partial forming of metal sheet Paper
Yongkang Zhang, Ming Zhou, Lan Cai, Youyi Xu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444728
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Sensors II
Novel micromachined thermal anemometer based on lateral polysilicon diode flow sensor Paper
Ming Qin, Qing-An Huang, Zhao-Yong Zhang, Xianwei Yan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444729
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Actuation
Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance Paper
Xiulan Cheng, Dong Xu, Jian Chen, Bingchu Cai, Guifu Ding
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444730
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Poster Session
Surface relief of TiNiCu thin films Paper
Xiulan Cheng, Dong Xu, Bingchu Cai, Li Wang, Jian Chen, Gang Li, Shi Xu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444731
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Design, fabrication, and characteristics of microheaters with low consumption power using SDB SOI membrane and trench structures Paper
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444732
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Micromachined optical switch with a vertical SU-8 mirror Paper
Suyan Liu, Minqiang Bu, Xiongying Ye, Zhaoying Zhou, Dacheng Zhang, Ting Li, Yilong Hao, Zhimin Tan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444734
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Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching Paper
Yuzhai Pan, Yongqiang Ning, Li Qin, Hui Suo, Yun Liu, Lijun Wang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444735
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Micromachining I
Design, simulation, and evaluation of novel corrugated diaphragms based on backside sacrificial layer etching technique Paper
Jing Chen, Li-Tian Liu, Zhijian Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444736
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Poster Session
Angular-dependent magnetoresistance characteristics in Si(001)/NiO(300 Å)/NiFe(t) bilayer system Paper
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444737
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Wheastone-bridge-type MR sensors of Si(001)/NiO(300 Å)/NiFe bilayer system Paper
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444738
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Microsensors and actuator arrays based on Pb(Zr,Ti)O3 thin film for AFM data storage Paper
Jiaru Chu, Junfeng Lu, Yicheng Wu, Wenhao Huang, Ryutaro Maeda, Toshihiro Itoh, Tadatomo Suga
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444739
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Optical Devices
Phase-shifting profilometer for measurement of the physical parameters of the fiber connector endface Paper
Feng Qian, Xiangzhao Wang, Xuefeng Wang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444740
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All-fiber sinusoidal phase-modulating laser diode interferometer insensitive to the intensity change of the light source Paper
Xuefeng Wang, Xiangzhao Wang, Caini Zhang, Danyang Yu, Gaoting Chen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444742
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Poster Session
Fabrication of a micromold using negative PMER Paper
Young Ah Kwon, Kyoung-Soo Chae, Dae Sok Jeoung, Jong Yong Kim, Sung Moon
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444743
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Modeling
Analysis of a novel MEMS electrostatic comb actuator for optical switching Paper
Pei-dong Yu, Guozhong Wang, Minghua Chen, Shizhong Xie
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444744
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RF Applications
Micromachined tunable rf capacitor with comb structure Paper
Yufeng Jin, Haixia Zhang, Min Miao, Kun Tang, Zhihong Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444745
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Poster Session
Optimization of two-photon excitation for 3D optical data storage Paper
DeQiang Chen, YongJun Zhou, Wenhao Huang, Andong Xia
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444746
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Sensors I
Bulk micromachined vibrating wheel rate gyroscope Paper
Rong Zhang, Zhongyu Gao, Zhiyong Chen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444747
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Micromachining II
Synchrotron light source and microlithography in Hefei National Synchrotron Radiation Laboratory Paper
Congliang Guo, Siyuan Huang, Yingui Zhou, Shinan Qian
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444748
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Poster Session
Earthworm-based miniature robot for intestinal inspection Paper
Dongxiang Chi, Guozheng Yan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444749
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Fabrication of microstamps used for oligonucleotide array synthesis Paper
Pengfeng Xiao, Nongyao He, Zhengchun Liu, Quanguo He, Jiqing Xu, Zuhong Lu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444750
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Hydrophilic surface formation on PDMS stamp by microwave plasma-induced grafting Paper
Quanguo He, Zhengchun Liu, Nongyao He, Pengfeng Xiao, Zuhong Lu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444751
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Fabrication of polyurethane molecular stamps for the synthesis of DNA microarray Paper
Zhengchun Liu, Quanguo He, Pengfeng Xiao, Nongyao He, Zuhong Lu, Liang Bo
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444752
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Peptide nucleic acid (PNA) biosensors for DNA recognition Paper
Jiong Li, Hong Wang, Lu Cheng, Yujie Zhao, Heping Liu, Nongyao He, Zuhong Lu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444753
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High-sensitivity stress-sensitive differential amplifier with gain control and temperature compensation Paper
Jingjing Li, Ruifeng Yue, Li-Tian Liu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444754
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Design and fabrication of a novel micromechanical variable optical attenuator Paper
Cong-Shun Wang, Hongju Li, Jing Fang, Dacheng Zhang, Sheng Chang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444755
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Polysilicon micromachined switch Paper
Zhengyuan Zhang, Zhiyu Wen, Shilu Xu, Kaicheng Li, Zhengfan Zhang, Shanglian Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444756
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RF Applications
Nanofluidics: enabling processes for biotech Paper
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444757
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