Microsensors and actuator arrays based on Pb(Zr,Ti)O3 thin film for AFM data-storage

Jiaru Chu; Junfeng Lu; Yicheng Wu; Wenhao Huang; Ryutaro Maeda; Toshihiro Itoh; Tadatomo Suga

doi:10.1117/12.444739

15 October 2001 Microsensors and actuator arrays based on Pb(Zr,Ti)O₃ thin film for AFM data storage

Jiaru Chu, Junfeng Lu, Yicheng Wu, Wenhao Huang, Ryutaro Maeda, Toshihiro Itoh, Tadatomo Suga

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444739
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

In order to deal with problems in SFM-based data storage, such as low data rate and tip stabilities, we designed and fabricated a micro cantilevers array based on Pb(Zr, Ti)O₃ (PZT) thin films. The data rate can be improved by parallel operation using the cantilevers array. And the tip wearing can be slowed down by a thermal mechanical writing mechanism using micro-heaters integrated on the tips, also taking advantage of the independent active tip-sampling spacing control by applying different DV bias to each PZT cantilever. The PZT film was prepared by a modified sol-gel process and electrostatic-spray coating method. The prototype of cantilevers array has been fabricated and characterized. With such a device, data bits with size of about 50nm was recorded and readout in the experiments.

Citation Download Citation

Jiaru Chu, Junfeng Lu, Yicheng Wu, Wenhao Huang, Ryutaro Maeda, Toshihiro Itoh, and Tadatomo Suga "Microsensors and actuator arrays based on Pb(Zr,Ti)O₃ thin film for AFM data storage", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444739

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