Integrated waveguide turning mirror in SOI

Yanzhe Tang; WenHui Wang; Tie Li; Yuelin Wang

doi:10.1117/12.445700

16 October 2001 Integrated waveguide turning mirror in SOI

Yanzhe Tang, WenHui Wang, Tie Li, Yuelin Wang

Proceedings Volume 4602, Semiconductor Optoelectronic Device Manufacturing and Applications; (2001) https://doi.org/10.1117/12.445700
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Planar lightwave circuits based on silicon are playing important roles in integrated optical systems. Integrated waveguide turning mirror (IWTM) is essential component for the compactness of optical devices. We design an integrated waveguide turning mirror with a 90 degree(s) directional change in SOI, which diminishes the primary loss from the displacement of waveguide and mirror and has very low mirror surface roughness. In this paper, the theory, design and fabrication of this IWTM are introduced. A beam splitter using the structure is fabricated to test the performances, and expected results are obtained.

Citation Download Citation

Yanzhe Tang, WenHui Wang, Tie Li, and Yuelin Wang "Integrated waveguide turning mirror in SOI", Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); https://doi.org/10.1117/12.445700

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