Simple and compact ESPI system for displacement measurements on specular reflecting or optical rough surfaces

Rene Skov Hansen

doi:10.1117/12.455187

5 February 2002 Simple and compact ESPI system for displacement measurements on specular reflecting or optical rough surfaces

Rene Skov Hansen

Author Affiliations +

Proceedings Volume 4607, Selected Papers from Fifth International Conference on Correlation Optics; (2002) https://doi.org/10.1117/12.455187
Event: Fifth International Conference on Correlation Optics, 2001, Chernivsti, Ukraine

Abstract

This paper presents a stable and compact speckle interferometer for doing out-of-plane displacement measurements on reflective as well as diffusely scattering object surfaces. The set-up is based on a nearly path length compensated interferometer of the Fizeau type and uses diffuse illumination of the object combined with a speckled reference wave. This combination eliminates the need of special optical components, and the interferometer can be built of commonly available components. The diffuse illumination wave is obtained by scattering coherent light from a diffusely scattering surface. The speckled reference wave is established by reflecting a part of the diffuse illumination wave from a glass plate placed in front of the object.

Citation Download Citation

Rene Skov Hansen "Simple and compact ESPI system for displacement measurements on specular reflecting or optical rough surfaces", Proc. SPIE 4607, Selected Papers from Fifth International Conference on Correlation Optics, (5 February 2002); https://doi.org/10.1117/12.455187

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