Metrology break-out group

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doi:10.1117/12.465472

24 July 2002 Metrology break-out group

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Proceedings Volume 4608, Nanostructure Science, Metrology, and Technology; (2002) https://doi.org/10.1117/12.465472
Event: Workshop on Nanostructure Science, Metrology, and Technology, 2001, Gaithersburg, MD, United States

Abstract

Participating members: Marylyn Bennett, Bill Banke, Yues Deslandes, Tim Goldburt, Al Szeienano, Al Hatheway, Mark Schattenburg, Jay Jun, Saroshi Gonda, Mike Thompson, Kevin Lyons, Jim Potzick, Mike McElfresh, John Villarruba, George Orsi, Dominique Drouin, Alexandre Couture

Citation Download Citation

- - "Metrology break-out group", Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); https://doi.org/10.1117/12.465472

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