Trace gas analysis by diode laser cavity ring-down spectroscopy

Wen-Bin Yan

doi:10.1117/12.462654

16 April 2002 Trace gas analysis by diode laser cavity ring-down spectroscopy

Wen-Bin Yan

Proceedings Volume 4648, Test and Measurement Applications of Optoelectronic Devices; (2002) https://doi.org/10.1117/12.462654
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

A new advanced infrared-based analyzer was developed to perform fast and reliable analysis of ultra trace gas impurities. The complete analytical system, the MTO-1000, is capable of measuring moisture to less than 200 parts-per- trillion (PPT) and perform single species detection of other ultra trace gas impurities such as NH₃, CO, Hcl, HF and CH₄ to parts-per-billion (PPB) and sub-PPB concentrations. Trace moisture calibration data will be presented to demonstrate the speed of response, sensitivity and accuracy of infrared Cavity Ring-Down Spectroscopy (CRDS). Emerging broadband capability to measure multiple trace gas species by CRDS technology will also be discussed.

Citation Download Citation

Wen-Bin Yan "Trace gas analysis by diode laser cavity ring-down spectroscopy", Proc. SPIE 4648, Test and Measurement Applications of Optoelectronic Devices, (16 April 2002); https://doi.org/10.1117/12.462654

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