Paper
4 June 2002 Performance of proton-implant/oxide aperture VCSELs and comparison with vector optical model
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Abstract
We report on the operational characteristics of hybrid proton implanted/selectively oxidized vertical-cavity surface-emitting lasers (VCSELs) in the 980 nm region. We investigate the output and spectral characteristics of different sized implant/oxide aperture VCSELs. Important operational variables such as current/voltage threshold, output power, efficiency and transverse operating wavelengths are extracted from experiments. A clear correlation is deduced between the sizes of implant and oxide apertures and the output power and lasing wavelength. Moreover, precise choice of implant/oxide dimensions yields a single transverse mode and high output power VCSEL. Finally, we simulate these different sized VCSELs with a vector optical solver (Illinois-VCSEL optical solver) based on a numerical mode-matching method developed by Seurin and Chuang. We successfully compare the experimental spectra with theoretical results and find very good agreement.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Piotr Konrad Kondratko, Erik W. Young, Jean-Francois Seurin, Shun-Lien Chuang, and Kent D. Choquette "Performance of proton-implant/oxide aperture VCSELs and comparison with vector optical model", Proc. SPIE 4649, Vertical-Cavity Surface-Emitting Lasers VI, (4 June 2002); https://doi.org/10.1117/12.469219
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Cited by 2 scholarly publications.
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KEYWORDS
Vertical cavity surface emitting lasers

Oxides

Resistance

Near field optics

Laser damage threshold

Performance modeling

Wafer-level optics

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