Materials science approach to the fabrication of 3D silicon photonic lattices

James G. Fleming; Shawn-Yu Lin

doi:10.1117/12.463893

25 April 2002 Materials science approach to the fabrication of 3D silicon photonic lattices

James G. Fleming, Shawn-Yu Lin

Proceedings Volume 4655, Photonic Bandgap Materials and Devices; (2002) https://doi.org/10.1117/12.463893
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

To date, most design of photonic lattice structures has been based on the use of complex and elaborate models run on high-end computer systems. This work has established that there are several general symmetries, which may result in full 3-D gaps, diamond, inverse face centered cubic and high index contrast simple cubic. The fill fraction is also known to be typically close to twenty five percent high index component. With this knowledge it is possible to come up with a variety of structures which have the same symmetry elements, but the building blocks of which are considerably different from those in the literature. With a reliable fabrication process it is now possible to fabricate a whole range of possible structures in a single run and then experimentally determine if any, in fact, display a gap. We have used this approach to demonstrate an open square structure with the diamond symmetry, three fold interpenetrating FCC structures, sheet structures with the inverse face centered cubic and hexagonal close packed structures, as well as 'stick figure' structures with elements of the inverse FCC or HCP structures. While they have the same symmetry elements as more established structures, these designs may have advantages for particular applications. For example, in the formation of cavities it may be advantageous to employ a structure made up of small discrete sub-units, as opposed to one consisting of 'infinitely long' rods.

Citation Download Citation

James G. Fleming and Shawn-Yu Lin "Materials science approach to the fabrication of 3D silicon photonic lattices", Proc. SPIE 4655, Photonic Bandgap Materials and Devices, (25 April 2002); https://doi.org/10.1117/12.463893

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KEYWORDS

Diamond

Semiconducting wafers

Photonic crystals

Chemical mechanical planarization

Materials science

Scanning electron microscopy

Silicon

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