Trilayer Resist Processing Using Spin-On Glass Intermediate Layers

Satish K. Gupta; Carver G. Audain

doi:10.1117/12.941792

21 May 1984 Trilayer Resist Processing Using Spin-On Glass Intermediate Layers

Satish K. Gupta, Carver G. Audain

Proceedings Volume 0469, Advances in Resist Technology I; (1984) https://doi.org/10.1117/12.941792
Event: 1984 Microlithography Conferences, 1984, Santa Clara, United States

Abstract

Of the many multilayer resist processes reported in recent years, the trilayer (RIE) resist process has emerged as the most versatile approach capable of defining high aspect ratio features in the micron to submicron regime using either optical, X-ray, or e-beam imaging. However, the relative complexity of the technique has impeded its widespread use in production. Implementation of trilayer resist pro-cessing would be greatly facilitated if spin-on glass (SOG) films were employed as the intermediate etch-mask (barrier) layer in place of the traditional sputtered or plasma deposited inorganic films. Allied Chemical's ACCUGLASS" 103 and ACCUGLASS" Ti-900 are SOG materials designed for use in trilayer resist processing. Cured films of 103 SOG are Si0₂-like while those from Ti-900 SOG are Ti0₂-like. In this paper, the properties of these SOG films and their use in trilayer processing are described. Results are presented for several trilayer resist processes carried out employing the SOG barrier layers and two new planarizing sublayer materials.

Citation Download Citation

Satish K. Gupta and Carver G. Audain "Trilayer Resist Processing Using Spin-On Glass Intermediate Layers", Proc. SPIE 0469, Advances in Resist Technology I, (21 May 1984); https://doi.org/10.1117/12.941792

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available