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24 July 2002 Macrocycle monomer having ethyleneoxy unit to buffer acid diffusion (new base for photoresist)
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Abstract
Crown ether derivatives are composed of multi-ethyleneoxy units and have an electron rich cavity that can accommodate a proton. We have broadly investigated the effect of lone pair electrons of accumulated oxygen. First, we studied whether these crown compounds can control acid diffusion or not. Second, we synthesized monomers containing cyclic multi-ethyleneoxy units and studied their effect in polymers. Finally, we compared them with amines. Crown either, 18-crown-6, has a proper cavity to capture a proton by hydrogen bonding and actually had enough basicity to control acid diffusion. These studies show that crown ether derivatives can replace amines as a bases to restrain acid diffusion.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Geunsu Lee, Keun-Kyu Kong, Jae Chang Jung, Ki-Soo Shin, Jae-Hyun Kang, Sang-Don Kim, Yong-Jun Choi, Se-Jin Choi, Deog-Bae Kim, and Jae-Hyun Kim "Macrocycle monomer having ethyleneoxy unit to buffer acid diffusion (new base for photoresist)", Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, (24 July 2002); https://doi.org/10.1117/12.474211
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