Accuracy of new analytical models for resist formation lithography

Juriy Malov; Christian K. Kalus; Henning Muellerke; Thomas Schmoeller; Robert Wildfeuer

doi:10.1117/12.474506

30 July 2002 Accuracy of new analytical models for resist formation lithography

Juriy Malov, Christian K. Kalus, Henning Muellerke, Thomas Schmoeller, Robert Wildfeuer

Proceedings Volume 4691, Optical Microlithography XV; (2002) https://doi.org/10.1117/12.474506
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The applicability and accuracy of newly developed analytical models for resist process effects are investigated. These models combine a stationary level set formulation with a lumped parameter model. They allow to propagate the 3D photoresist profile given the 3D aerial image distribution. The first model, based on the vertical propagation algorithm (VPM), takes into account the 2D intensity distribution inside the resist, including the absorption. The second model incorporates the scaled defocus algorithm (SCDF), which describes the 3D intensity of the resist, taking into account the defocus values. In this paper we investigate the applicability for any geometry, for process window determination and the accuracy by taking reference to the fully fledged simulator SOLID-C. The suggested methods allow to calculate 3D resist profile in a fast way thereby enabling the prediction of large areas.

Citation Download Citation

Juriy Malov, Christian K. Kalus, Henning Muellerke, Thomas Schmoeller, and Robert Wildfeuer "Accuracy of new analytical models for resist formation lithography", Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); https://doi.org/10.1117/12.474506

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available