Influence of laser spatial parameters and illuminator pupil-fill performance on the lithographic performance of a scanner

Stephen P. Renwick; Steve D. Slonaker; Ivan Lalovic; Khurshid Ahmed

doi:10.1117/12.474524

30 July 2002 Influence of laser spatial parameters and illuminator pupil-fill performance on the lithographic performance of a scanner

Stephen P. Renwick, Steve D. Slonaker, Ivan Lalovic, Khurshid Ahmed

Author Affiliations +

Proceedings Volume 4691, Optical Microlithography XV; (2002) https://doi.org/10.1117/12.474524
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

Litho-tool illuminator performance, characterized by quantitative measurements of pupil-fill intensity distribution and cross-field uniformity, has been cited as a key contributor to CD uniformity. While both modeling exercises with simulated pupil fills and measurements of real pupil fills have been undertaken, quantitative assessments of the pupil's effect when compared with other CD error contributors are rare. An integral part of illuminator performance is, of course, the laser. Not only must a litho laser meet stringent requirements at installation, but also the litho tool and laser suppliers are responsible for ensuring performance after maintenance activity, such as laser module replacement. We have investigated the effects of adjustable spatial laser parameters on the illuminator pupil fill as measured via a pinhole reticle and on illumination uniformity as measured by the scanner. We present the experimental results of these studies, estimates of their effects on litho performance via modeling, the sensitivity of lithographic performance to the spatial parameters, and an assessment of their importance relative to other lithographic variables affecting CD uniformity. Results show that not only is the baseline illuminator pupil-fill performance a small contributor to lithographic error, but also that the system is stable in the presence of laser adjustments.

Citation Download Citation

Stephen P. Renwick, Steve D. Slonaker, Ivan Lalovic, and Khurshid Ahmed "Influence of laser spatial parameters and illuminator pupil-fill performance on the lithographic performance of a scanner", Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); https://doi.org/10.1117/12.474524

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available