Translator Disclaimer
Paper
12 July 2002 Exact computation of scalar 2D aerial imagery
Author Affiliations +
Abstract
An exact formulation of the problem of imaging a 2D object through a Koehler illumination system is presented; the accurate simulation of a real layout is then not time- limited but memory-limited. The main idea behind the algorithm is that the boundary of the region that comprise a typical TCC Is made up of circular arcs, and therefore the area - which determines the value of the TCC - should be exactly computable in terms of elementary analytical functions. A change to integration around the boundary leads to an expression with minimal dependence on expensive functions such as arctangents and square roots. Numerical comparisons are made for a simple 2D structure.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ronald L. Gordon "Exact computation of scalar 2D aerial imagery", Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); https://doi.org/10.1117/12.475687
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
Back to Top