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11 July 2002 Microminiature temperature-compensated magnetoelastic strain gauge
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Our objective was to demonstrate a microminiature magnetoelastic strain gauge that provides both strain and temperature signals without additional sensors. Iron based magnetoelastic materials were embedded within superelastic nickel/titanium (NiTi) tubing. NiTi stress was transferred to the ferrite, causing a permeability change sensed by a tiny coil. The coil/bridge was excited (70 KHz AC), synchronously demodulated, and amplified to produce a voltage output proportional to coil/ferrite impedance. A DC voltage was also applied and separately conditioned to provide an output proportional to coil resistance; this signal was used to provide thermal compensation. Controlled strains were applied and 6 Hz cyclic outputs recorded simultaneously from the magnetoelastic strain gauge and conventional foil strain gauges. The magnetoelastic strain gauge tracked the foil gauge with minimal hysteresis and good linearity over 600 microstrain; repeatability was approximately 1.5 microstrain. The magnetoelastic strain gauge's gauge factor was computed from delta inductance/original inductance under static strain conditions. Temperatures of 25-140 deg C resulted in an uncompensated shift of 15 microstrain/deg C, and compensated shift of 1.0 microstrain/deg C. A sensitive micro-magnetoelastic strain gauge was demonstrated using the same sensor to detect stress and temperature with no moving parts, high gauge factor, and good thermal stability.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven W. Arms and Christopher P. Townsend "Microminiature temperature-compensated magnetoelastic strain gauge", Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002);

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