High-performance hierarchical fracturing

Nicolas B. Cobb; Weidong Zhang

doi:10.1117/12.476933

1 August 2002 High-performance hierarchical fracturing

Nicolas B. Cobb, Weidong Zhang

Author Affiliations +

Proceedings Volume 4754, Photomask and Next-Generation Lithography Mask Technology IX; (2002) https://doi.org/10.1117/12.476933
Event: Photomask and Next Generation Lithography Mask Technology IX, 2002, Yokohama, Japan

Abstract

We describe in more detail a mask data preparation (MDP) flow previously proposed. The focus on this paper is a performance comparison of hierarchical fracturing techniques compared to standard fracturing. Our flow uses GDSII data as input, including a GDSII-based job deck description. The output is maximally compacted, trapezoidal mask writer (MW) formatted data. Our flow takes advantage of hierarchy explicit in the GDSII file(s). This allows optimal determination of 'cover cells', which are repeatable groups of patterns within the data. The use of cover cells allows a reduction of fracturing runtime. In one case, a 21 GB MEBES file was fractured in 30 hours using the standard technique and 53 minutes using the hierarchical cover cell technique.

Citation Download Citation

Nicolas B. Cobb and Weidong Zhang "High-performance hierarchical fracturing", Proc. SPIE 4754, Photomask and Next-Generation Lithography Mask Technology IX, (1 August 2002); https://doi.org/10.1117/12.476933

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