Bimorph actuators for MOEMS

Vladislav Djakov; Syed Ejazu Huq

doi:10.1117/12.462888

19 April 2002 Bimorph actuators for MOEMS

Vladislav Djakov, Syed Ejazu Huq

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462888
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Thermally activated bimorph actuators suitable for a range of MOEMS applications, that provide large deflections (up to approximately 200micrometers ) at low voltages and low power, are being developed at the Rutherford Appleton Laboratory (RAL) UK using state of the art microfabrication techniques in a variety of materials. Interdigitated bimorph cantilevers using structural materials (polyamide and gold) with different coefficients of thermal expansion (CTE) and sandwiched microheaters, curl-up from substrate due to residual stress induced during the fabrication process. The initial deflection is approximately 300 micrometers in the vertical plane and 150micrometers in horizontal plane. Operating frequency of up to 50 Hz was achieved with moderate power dissipation (4-5MW) and approximately 50micrometers displacement in vertical direction.

Citation Download Citation

Vladislav Djakov and Syed Ejazu Huq "Bimorph actuators for MOEMS", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462888

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