Fully CMOS-compatible low-power microheater

J. Laconte; C. Dupont; A. Akheyar; J. P. Raskin; D. Flandre

doi:10.1117/12.462865

19 April 2002 Fully CMOS-compatible low-power microheater

J. Laconte, C. Dupont, A. Akheyar, J. P. Raskin, D. Flandre

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462865
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

An original design of a polysilicon loop-shaped microheater on a thin stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation (20.000 degree(s)C/W) and very low power consumption (20 mW for heating at 400 degree(s)C). Moreover, the use of CMOS-IC compatible TMAH-based bulk-micromachining techniques will allow easy and low cost gas sensor integration.

Citation Download Citation

J. Laconte, C. Dupont, A. Akheyar, J. P. Raskin, and D. Flandre "Fully CMOS-compatible low-power microheater", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462865

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