Optimization of the planar pellistor using finite element analysis

Graeme A. McRobbie; Fraser Clark; Chris Tandy

doi:10.1117/12.462816

19 April 2002 Optimization of the planar pellistor using finite element analysis

Graeme A. McRobbie, Fraser Clark, Chris Tandy

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462816
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

The planar pellistor is a thin film microsensor used for the detection of inflammable gases. In its simplest, it consists of a metallic meander structure that serves both as a heater for the catalyst and as a temperature sensor. For low power operation thermal insulation between the sensor and the substrate is vital and is achieved by a thin silicon nitride membrane. The optimization of such a structure in terms of the sensor's dimensions is discussed.

Citation Download Citation

Graeme A. McRobbie, Fraser Clark, and Chris Tandy "Optimization of the planar pellistor using finite element analysis", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462816

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