Surface tension defects in microfluidic self-alignment

Jan Lienemann; Andreas Greiner; Jan G. Korvink

doi:10.1117/12.462862

19 April 2002 Surface tension defects in microfluidic self-alignment

Jan Lienemann, Andreas Greiner, Jan G. Korvink

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462862
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Self-alignment in the fluidic phase is an alternative technique to conventional pick-and-place assembly, providing cost-effective, precise assembly of millions of microparts. For accurate alignment, the control of unwanted surface defects lowering alignment precision. Local minima are investigated and the modulation of the energy curve is simulated. Furthermore, hytsteresis effects are studied. The simulation results allow predictions for the modeling of the fluidic surface tension driven self alignment and thus provide conditions for the robustness of the fabrication process.

Citation Download Citation

Jan Lienemann, Andreas Greiner, and Jan G. Korvink "Surface tension defects in microfluidic self-alignment", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462862

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available