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13 September 2002Excimer laser polymer ablation: the first 20 years
Excimer laser polymer ablation has been an active field of research and development for some twenty years now. We briefly review basic mechanistic aspects of the interaction, practical considerations related to polymer processing by ablation and applications in micromachining.
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Peter E. Dyer, "Excimer laser polymer ablation: the first twenty years," Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482126