Generation and manipulation of nanostructures by pulsed-laser ablation

Anthony J. Pedraza; Jason D. Fowlkes; Yingfeng Guan

doi:10.1117/12.482084

13 September 2002 Generation and manipulation of nanostructures by pulsed-laser ablation

Anthony J. Pedraza, Jason D. Fowlkes, Yingfeng Guan

Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482084
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

Laser-induced surface structuring of silicon was studied using fluences close to the metering threshold and He gas background atmosphere. The effects of an initial surface microstructured region and of light polarization on the evolution of the surface topography were investigated. The microstructured surface topology consisted of an array of microholes surround by microcones of 2-3 micrometers tip-diameter and over 20 micrometers high. Pulsed laser irradiation of laser- microstructured silicon induces the formation of nanostructures. Nanocolumns having a diameter of 100 to 200 nm and reaching a height of up to 3 micrometers upon cumulative laser pulses grow on top of every microcone. The mechanisms of nanocolumn origin and growth are analyzed. Periodic undulations approximately 10 nm-high are formed when flat silicon substrates are irradiated with polarized laser light. These periodic structures have a wavelength that is a function of the light wavelength and the angle of incidence of the laser beam. At a slightly higher laser fluence, approximately 30 nm-diameter nanoparticles form on the surface of laser irradiated flat silicon specimens. Linear arrays of silicon nanoparticles with fairly uniform size that extend up to a millimeter are formed if the irradiation is performed using polarized light or the irradiated area contains a microstructured region. These nanostructures are analyzed within the frame of the theory of laser induced surface periodic structures.

Citation Download Citation

Anthony J. Pedraza, Jason D. Fowlkes, and Yingfeng Guan "Generation and manipulation of nanostructures by pulsed-laser ablation", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482084

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