Laser microprocessing in microelectronics, data storage, and photonics

Yongfeng Lu; Wen Dong Song; ZhongMin Ren; Chengwu An; DaMing Liu; Sumei Huang; Weijie Wang; Ming Hui Hong; Tow Chong Chong; B. J. Cho; JiNan Zeng; C. F. Tan

doi:10.1117/12.482088

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13 September 2002 Laser microprocessing in microelectronics, data storage, and photonics

Yongfeng Lu, Wen Dong Song, ZhongMin Ren, Chengwu An, DaMing Liu, Sumei Huang, Weijie Wang, Ming Hui Hong, Tow Chong Chong, B. J. Cho, JiNan Zeng, C. F. Tan

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Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482088
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

Laser microprocessing has been extensively studies with applications in microelectronics, data storage and photonics. In addition to the fundamental aspects of laser materials interactions, we have investigated various applications of laser microprocessing in different areas. Laser cleaning has been studies systematically both theoretically and experimentally for dry surface cleaning and steam surface cleaning. This technology has been applied for cleaning magnetic head, magnetic sliders, suspension, laser mold cleaning and laser deflash for IC packages. Laser texturing and related processes such as laser bumping, laser tagging have been studied for magnetic recording applications. The other laser works include real-time monitoring of laser surface processing, laser-induced controllable periodic structures, laser nanopatterning by scanning probe microscope tip-enhanced laser irradiation. The further prospects of using laser microprocessing for applications in formation of ultrashallow (less than 50 nm) pn junction for next-generation MOS devices, laser generation of Si nanoparticles for quantum-dot flash memory and light emission devices are addressed.

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Yongfeng Lu, Wen Dong Song, ZhongMin Ren, Chengwu An, DaMing Liu, Sumei Huang, Weijie Wang, Ming Hui Hong, Tow Chong Chong, B. J. Cho, JiNan Zeng, and C. F. Tan "Laser microprocessing in microelectronics, data storage, and photonics", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482088

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