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13 September 2002 New techniques for laser micromachining MEMS devices
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Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482096
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States
Abstract
Two new laser mask projection techniques Synchronized Image Scanning (SIS) and Bow Tie Scanning (BTS) have been developed for the efficient fabrication of dense arrays of repeating 3D microstructures on large area substrates. Details of these techniques are given and examples of key industrial applications are shown.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles Abbott, Ric M. Allott, Bob Bann, Karl L. Boehlen, Malcolm C. Gower, Phil T. Rumsby, Ines Stassen Boehlen, and Neil Sykes "New techniques for laser micromachining MEMS devices", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482096
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