Paper
13 September 2002 Pulsed-laser ablation plume dynamics: characterization and modeling
Thomas P. Svobodny, Rand R. Biggers
Author Affiliations +
Abstract
High quality thin films (100nm to several 1000nm) of many complex material systems such as the high temperature superconductor YBCO, have been deposited using pulsed laser ablation. Long lengths of high quality YBCO on metallic conductors are needed to meet industrial and government requirements. Although, pulsed laser deposition (PLD) grows the best YBCO films on meter lengths of metallic conductors, it has not been proven to be a consistent manufacturing process. PLD is simple in concept but has quite complicated plume and growth dynamics which are not well understood. In this study we use in-situ time-resolved mesurements of collision-driven plume emissions to characterize critical deposition parameters and to develop a computational model which includes these dynamics in a reacting PLD plume.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas P. Svobodny and Rand R. Biggers "Pulsed-laser ablation plume dynamics: characterization and modeling", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482066
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KEYWORDS
Copper

Laser ablation

Visualization

Barium

Emission spectroscopy

Pulsed laser deposition

Oxides

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