Paper
13 September 2002 TEA CO2 laser surface modification of titanium ceramic thin films
Biljana M. Gakovic, Milan S. Trtica, Tomislav M. Nenadovic
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Abstract
The surface modification of titanium based ceramics thin films, induced by pulsed laser beam, was investigated in this work. Thin films of titanium nitride (TiN) and titanium diboride (TiB2) were deposited on austenitic stainless steel substrate by two Physical Vapor Deposition (PVD) techniques and exposed in air atmosphere to a focused Transversely Excited Atmosphere (TEA) CO2 laser irradiation. In these experiments two types of laser pulses have been used. One pulse was composed of an initial spike (FWHM equals 120 ns) with a tail (duration of 2 microseconds) while the other contained only the initial spike (FWHM equals 80 ns). Morphological changes of deposited ceramics, induced by successive laser pulses, have shown a dependence on the laser beam parameters (pulse energy, laser pulse duration, peak power density, number of pulses, etc.) and thin films characteristics. Thin films, investigated in this work, possessed reflectivity above 90% at wavelength of about 10 microns. Pulse peak power densities of 100 and 170 MW/cm2 were used in these experiments and have induced the surface modifications of TiN and TiB2 thin films. Depending on laser beam parameters, a change of color, grain growth, hydrodynamic effects, in TiN thin film were registered while on TiB2 we noticed a change in color of the thin film, cracking and exfoliation.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Biljana M. Gakovic, Milan S. Trtica, and Tomislav M. Nenadovic "TEA CO2 laser surface modification of titanium ceramic thin films", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482059
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KEYWORDS
Thin films

Tin

Pulsed laser operation

Titanium

Carbon dioxide lasers

Ceramics

Reflectivity

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