Printability of hard and soft defects in 193-nm lithography

Vicky Philipsen; Rik M. Jonckheere; Stephanie Kohlpoth; Christoph M. Friedrich; Juan Andres Torres

doi:10.1117/12.479336

16 August 2002 Printability of hard and soft defects in 193-nm lithography

Vicky Philipsen, Rik M. Jonckheere, Stephanie Kohlpoth, Christoph M. Friedrich, Juan Andres Torres

Proceedings Volume 4764, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2002) https://doi.org/10.1117/12.479336
Event: 18th European Mask Conference on Mask Technology for Integrated Circuits and Micro-Components, 2002, Munich-Unterhaching, Germany

Abstract

A systematic attempt has been undertaken to investigate the printability of mask defects for 100nm lithography using 193nm wavelength. The main purpose is the study of soft defects (particles), but hard defects have been taken as a reference. A reticle is designed with programmed soft and chrome defects in cells with different densities. As soft defects resist dots are used. Printability is first assessed by simulation, using ProLith v7.0. Wafers are printed using QUASAR illumination and evaluated by a CD SEM. We demonstrate that aerial image simulations and AIS measurements can predict the qualitative trends in defect printability. A thorough quantitative analysis is presented.

Citation Download Citation

Vicky Philipsen, Rik M. Jonckheere, Stephanie Kohlpoth, Christoph M. Friedrich, and Juan Andres Torres "Printability of hard and soft defects in 193-nm lithography", Proc. SPIE 4764, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (16 August 2002); https://doi.org/10.1117/12.479336

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available