Optimal dynamic performance for high-precision actuators/stages

Curt Preissner; Soon-Hong Lee; Thomas J. Royston; Deming Shu

doi:10.1117/12.482149

9 September 2002 Optimal dynamic performance for high-precision actuators/stages

Curt Preissner, Soon-Hong Lee, Thomas J. Royston, Deming Shu

Proceedings Volume 4771, Optomechanical Design and Engineering 2002; (2002) https://doi.org/10.1117/12.482149
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

System dynamic performance of actuator/stage groups, such as those found in optical instrument positioning systems and other high-precision applications, is dependent upon both individual component behavior and the system configuration. Experimental modal analysis techniques were implemented to determine the six degree of freedom stiffnesses and damping for individual actuator components. These experimental data were then used in a multibody dynamic computer model to investigate the effect of stage group configuration. Running the computer model through the possible stage configurations and observing the predicted vibratory response determined the optimal stage group configuration. Configuration optimization can be performed for any group of stages, provided there is stiffness and damping data available for the constituent pieces.

Citation Download Citation

Curt Preissner, Soon-Hong Lee, Thomas J. Royston, and Deming Shu "Optimal dynamic performance for high-precision actuators/stages", Proc. SPIE 4771, Optomechanical Design and Engineering 2002, (9 September 2002); https://doi.org/10.1117/12.482149

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available