White-light interferometry via an endoscope

Michael W. Lindner

doi:10.1117/12.472208

20 June 2002 White-light interferometry via an endoscope

Michael W. Lindner

Proceedings Volume 4777, Interferometry XI: Techniques and Analysis; (2002) https://doi.org/10.1117/12.472208
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

White-light interferometry is a powerful tool for high resolution measurements on rough surfaces. The technology can be used for roughness measurements on technical surfaces with sub-micrometers tolerances. However, in automotive industry the surface of interest may be located inside a small drilling. In this case the surface properties cannot be measured by conventional white-light interferometry. For this purpose we introduce the concept of white-light interferometry via an endoscope. The setup uses a Michelson-Interferometer and the endoscope is placed into the object arm. The endoscope produces several intermediate images of the object within the object arm. In order to approximately gain a Linnik-setup we insert a second endoscope into the reference arm. We investigate different concepts in order to perform a depth scan: A scan of the reference mirror, a scan of the object and a new intermediate image scan. By using this intermediate image scan, the measuring range in depth is not limited by the aperture of the endoscope and each point of the object is measured with the maximum lateral resolution. Feasibility experiments have been performed in our laboratory. First measurement results are presented and benefits and limitations of white-light interferometry via an endoscope are discussed.

Citation Download Citation

Michael W. Lindner "White-light interferometry via an endoscope", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); https://doi.org/10.1117/12.472208

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