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19 June 2002 Application of digital holographic microinterferometer for microelements testing
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Competitive trends to miniaturize Micro Electro Mechanical (and Optical) Systems (MEMS, MOEMS), electronic components and assemblies introduce unprecedented requirements concerning their design, manufacturing and testing. The paper presents a concept of digital holographic microinterferometrer (DHMI) for microelement deformation testing. DHMI may provide all components of the displacement vector and work with reflecting and scattering surfaces of object under test. For numerical reconstruction of digitally stored holograms a new method based on the sphere transformation theory is applied. It significantly simplifies the analyses in comparison with a conventional method directly based on the Fresnel approach. The algorithms proposed enable fast and high accuracy measurements. In the paper the practical realization of DHMI is presented. The measurement methodology is shown on the example of deformation testing of pressure loaded silicon micromembranes. The results were used for verification of micromembrane modeling by FEM.
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Leszek A. Salbut, Agata Jozwicka, Pawel Dymerski, and Michal Jozwik "Application of digital holographic microinterferometer for microelements testing", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002);

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