Characterization of the frequency-modulated continuous wave subsystem of an angstrom-accuracy absolute interferometer

Lukas Max Krieg; Bas L. Swinkels; Joseph J. M. Braat

doi:10.1117/12.473536

19 June 2002 Characterization of the frequency-modulated continuous wave subsystem of an angstrom-accuracy absolute interferometer

Lukas Max Krieg, Bas L. Swinkels, Joseph J. M. Braat

Author Affiliations +

Proceedings Volume 4778, Interferometry XI: Applications; (2002) https://doi.org/10.1117/12.473536
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

An external cavity diode laser is used as source for a frequency modulated continuous wave (FMCW) interferometer intended to determine absolute optical path differences (OPD) of up to 3mm with a target accuracy of 0.3 microns. This interferometer will eventually be paired with a heterodyne interferometer to extend the accuracy of the system to 0.1nm. Rather than using injection current modulation for the FMCW subsystem, the frequency sweep is provided by moving a mirror of the external cavity with a piezo element. A noise source analysis for this particular setup is provided, and estimates of the maximum attainable accuracy are made.

Citation Download Citation

Lukas Max Krieg, Bas L. Swinkels, and Joseph J. M. Braat "Characterization of the frequency-modulated continuous wave subsystem of an angstrom-accuracy absolute interferometer", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473536

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