High-precision 2D-angle measurement interferometer

Zongtao Ge; Mitsuo Takeda

doi:10.1117/12.473545

19 June 2002 High-precision 2D-angle measurement interferometer

Zongtao Ge, Mitsuo Takeda

Proceedings Volume 4778, Interferometry XI: Applications; (2002) https://doi.org/10.1117/12.473545
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Fourier transform method and phase shift method are widely used to analyze fringe patterns to obtain surface profiles. In these ordinary fringe analysis methods, tilt or angle in the measured surface is often cancelled by certain operations. On the other hand, tilt can be considered as part of the measured surface, and obtained by fitting the measured surface profile with a line or plane. Therefore, we proposed a high-precision angle measurement method using fringe analysis techniques. In this paper, a 2-dimensional angular measurement interferometer is constructed to realize the proposed method, and the output curve of the measurement system is calibrated using a high-resolution autocollimator and a PZT driven lever system as the references. Fringe patterns obtained by the experiments are analyzed by both of the Fourier transform method and phase shift method, and the experimental results are compared with each other. Furthermore, the characteristics of the measurement system, including stability, resolution, and accuracy are evaluated and analyzed. Experiments verified that it could achieve both a wide measurement range of over +/- 2160 arcsec (+/- 0.6Degree) and a high angular resolution of 0.01 arcsec, simultaneously.

Citation Download Citation

Zongtao Ge and Mitsuo Takeda "High-precision 2D-angle measurement interferometer", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473545

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