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19 June 2002 In-plane displacement measurement using ESPI based on spatial fringe analysis method
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Abstract
The speckle interferometry is used to measure the shape of an object with a rough surface. In particular, the precise measurement can be easily performed with ESPI using fringe scanning technology. Then, the measurement accuracy is influenced with the ratio between the speckle size and the pixel size of a CCD. Sometimes, this causes the problem concerning an optical dislocation. In this paper, an in-plane displacement is measured by the arrangement using the two collimated beams. The measurement is performed by ESPI technology with the spatial fringe analysis method under the optimal condition. The condition is discussed as the measurement parameters concerning the speckle's size and the passband of band pass filter. In the experiment of the measurement of in-plane displacement, the optimal condition can evade the problem of occurrence of optical displacements. At the same time, the precise measurement can be performed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasuhiko Arai and Shunsuke Yokozeki "In-plane displacement measurement using ESPI based on spatial fringe analysis method", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473555
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