In-process measurements of material removal in fluid jet polishing

Hedser H. van Brug; Mietta Groeneveld; Silvia M. Booij; Joseph J. M. Braat

doi:10.1117/12.473566

19 June 2002 In-process measurements of material removal in fluid jet polishing

Hedser H. van Brug, Mietta Groeneveld, Silvia M. Booij, Joseph J. M. Braat

Proceedings Volume 4778, Interferometry XI: Applications; (2002) https://doi.org/10.1117/12.473566
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

A prototype of a system for in-process monitoring of material removal in fluid jet polishing (FJP) is presented. The measurements make use of temporal phase unwrapping (TPU) allowing for a large working range. The measurement system will be discussed, with all problems that had to be overcome like water on the surface and vibrations, as well as the FJP system. The basics behind TPU will be presented and the first results will be shown. Finally, the capabilities of the system will be discussed. The presented system enables the in-process monitoring of the footprint as obtained by the FJP technique and measurement of the material removal rate.

Citation Download Citation

Hedser H. van Brug, Mietta Groeneveld, Silvia M. Booij, and Joseph J. M. Braat "In-process measurements of material removal in fluid jet polishing", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473566

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