Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method

Raul Garcia-Llamas; J. Felix Aguilar

doi:10.1117/12.451833

22 October 2002 Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method

Raul Garcia-Llamas, J. Felix Aguilar

Author Affiliations +

Proceedings Volume 4780, Surface Scattering and Diffraction for Advanced Metrology II; (2002) https://doi.org/10.1117/12.451833
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

We obtain the reflection spectra of p-polarized light from metallic gratings fabricated by means of the interference technique. The gratings have constant period and heights are varied by changing the exposure time of the interference pattern on the sample. The experimental spectra show two minima due to the excitation of surface plasmons, and they are compared with the corresponding numerical results obtained with two models, the Rayleigh theory and the rigorous integral method. In order to demonstrate the validity of the Rayleigh hypothesis the amplitudes of the gratings are chosen close to the Rayleigh limit.

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Raul Garcia-Llamas and J. Felix Aguilar "Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method", Proc. SPIE 4780, Surface Scattering and Diffraction for Advanced Metrology II, (22 October 2002); https://doi.org/10.1117/12.451833

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