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22 October 2002 High-order correlation from rough surface scattering
Zu-Han Gu
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Proceedings Volume 4780, Surface Scattering and Diffraction for Advanced Metrology II; (2002) https://doi.org/10.1117/12.452320
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States
Abstract
We proposal to apply two optical setups of a 1-D rough dielectric film on a glass substrate and a randomly weak dielectric film on a reflecting metal substrate for the measurement of high order correlation from rough surface scattering. The angular amplitude and intensity correlations are measured. Due to multiple scattering, when the input laser beam size is comparatively small or close to the travel pass length inside the film, C(2) and C(3) are measured by subtracting amplitude correlation from intensity correlation.
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Zu-Han Gu "High-order correlation from rough surface scattering", Proc. SPIE 4780, Surface Scattering and Diffraction for Advanced Metrology II, (22 October 2002); https://doi.org/10.1117/12.452320
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KEYWORDS
Scattering
Dielectrics
Correlation function
Glasses
Laser scattering
Light scattering
Metals
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