Scatterometer for measuring the visible light scattered from 2D rough surfaces

Neil Charles Bruce; Oscar Rodriguez Herrera; Martha Rosete-Aguilar

doi:10.1117/12.451847

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22 October 2002 Scatterometer for measuring the visible light scattered from 2D rough surfaces

Neil Charles Bruce, Oscar Rodriguez Herrera, Martha Rosete-Aguilar

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Proceedings Volume 4780, Surface Scattering and Diffraction for Advanced Metrology II; (2002) https://doi.org/10.1117/12.451847
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

In this work we present the design of an instrument for measuring the scattering of light by a two-dimensional rough surface in the visible between 550nm and 830nm. An elliptical mirror is used to collect the light scattered by a 2D-surface which is placed at the first focus of the ellipse. A relay is placed near to the second focus of the ellipse to collect the light scattered by the surface in each direction, that is, parallel rays leaving the illuminated 2D surface at an arbitrary angle are brought to a point at the focal plane of the relay. The light is detected by a CCD camera. To cover 180 degrees field of view it is necessary to move the CCD linearly in two directions in the focal plane.

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Neil Charles Bruce, Oscar Rodriguez Herrera, and Martha Rosete-Aguilar "Scatterometer for measuring the visible light scattered from 2D rough surfaces", Proc. SPIE 4780, Surface Scattering and Diffraction for Advanced Metrology II, (22 October 2002); https://doi.org/10.1117/12.451847

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