Author Affiliations +
Leonid Shabel'nikov,1 Vladimir Nazmov,2 Franz Josef Pantenburg,2 Juergen Mohr,3 Volker Saile,3 Vecheslav Yunkin,1 Sergey Kouznetsov,1 Valery F. Pindyurin,4 Irina Snigireva,5 Anatoly A. Snigirev5
1Institute of Microelectronics Technology (Russia)
2Institute of Microstructure Technology (Germany)
3Forschungszentrum Karlsruhe GmbH (Germany)
4Budker Institute of Nuclear Physics (Russia)
5European Synchrotron Radiation Facility (France)