Fabrication of multiple-pitch waveguide gratings by using a single CGH phase mask

Hyong Sik Won; Seok Ho Song; Pill Soo Kim; YooYong Lee

doi:10.1117/12.453920

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25 November 2002 Fabrication of multiple-pitch waveguide gratings by using a single CGH phase mask

Hyong Sik Won, Seok Ho Song, Pill Soo Kim, YooYong Lee

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Proceedings Volume 4805, Design and Fabrication of Planar Optical Waveguide Devices and Materials; (2002) https://doi.org/10.1117/12.453920
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Monolithic fabrication of submicrometer multiple-pitch gratings by use of a single computer-generated phase mask(CGPM) is proposed. The CGPM is a computer-generated Fourier hologram generating multiple diffracted beams with equal intensity from a single incident beam. The submicrometer grating periods differing by as little as a few angstroms are estimated with basis of multiple diffraction angles and it is compared with experimental results.

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Hyong Sik Won, Seok Ho Song, Pill Soo Kim, and YooYong Lee "Fabrication of multiple-pitch waveguide gratings by using a single CGH phase mask", Proc. SPIE 4805, Design and Fabrication of Planar Optical Waveguide Devices and Materials, (25 November 2002); https://doi.org/10.1117/12.453920

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