Paper
5 November 2002 Spatially nanostructured silicon for optical applications
Joachim Diener, Dmitri I. Kovalev, Nicolai Kuenzner, Egon Gross, Gennadi Polisski, Frederick Koch, Viktor Yu. Timoshenko, Minoru Fujii
Author Affiliations +
Abstract
We report on a strong intrinsic optical anisotropy of silicon induced by dielectric nanopatterning. As a result, in-plane birefringence of anisotropically nanostructured (110) oriented Si is found to be 105 times larger than that observed in bulk silicon. The difference of the main values of the anisotropic refractive index (Δn) exceeds that of any natural birefringent crystal. Δn depends strongly on the typical size of the silicon nanowires assembling the layers and the dielectric constant of the medium surrounding these silicon nanoparticles. We show that dielectric stacks of anisotropically nanostructured Si can act as a dichroic distributed Bragg reflectors or optical microcavities. The reflection/transmission behavior of these structures is sensitive to the polarization of the incident linearly polarized light. These findings open the possibility of an application of optical devices based on birefringent silicon layers in a wide field.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joachim Diener, Dmitri I. Kovalev, Nicolai Kuenzner, Egon Gross, Gennadi Polisski, Frederick Koch, Viktor Yu. Timoshenko, and Minoru Fujii "Spatially nanostructured silicon for optical applications", Proc. SPIE 4808, Optical Properties of Nanocrystals, (5 November 2002); https://doi.org/10.1117/12.451973
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Silicon

Crystals

Dielectrics

Refractive index

Etching

Nanostructuring

Optical microcavities

Back to Top