3-D surface profile measurement by 2-D heterodyne low-coherence interferometer

Hirokazu Matsumoto; Akiko Hirai

doi:10.1117/12.530945

19 November 2003 3-D surface profile measurement by 2-D heterodyne low-coherence interferometer

Hirokazu Matsumoto, Akiko Hirai

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.530945
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

A Novel setup for two-dimensional (2-D) parallel measurements of low-coherence heterodyne signal by using a tandem interferometer and a 2-D sensor has been developed. Generally speaking, it is difficult to obtain heterodyne signals whose frequencies are much higher than the frame rate of the coventional 2-D sensor. A mode-locked femtosecond laser (MLFL) is used as a light source.

Citation Download Citation

Hirokazu Matsumoto and Akiko Hirai "3-D surface profile measurement by 2-D heterodyne low-coherence interferometer", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.530945

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