Both phase-height mapping and coordinates calibration in PMP

Xianyu Su; Wanzhong Song; Yiping Cao; Liqun Xiang

doi:10.1117/12.529727

19 November 2003 Both phase-height mapping and coordinates calibration in PMP

Xianyu Su, Wanzhong Song, Yiping Cao, Liqun Xiang

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.529727
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

A new method for the system calibration in phase-measuring profilometry (PMP) is presented. A new calibration gauge containing four virtual calibration planes is designed. With this calibration gauge, both the phase-height mapping and 3D coordinates calibration could be done simultaneously through only one measurement. Additionally, to recover continuous phase distribution of all steps with same height, an iterative procedure is proposed. The effectiveness of the proposed method is demonstrated by experimental results. (Summary only available)

Citation Download Citation

Xianyu Su, Wanzhong Song, Yiping Cao, and Liqun Xiang "Both phase-height mapping and coordinates calibration in PMP", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.529727

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