Confocal microscopy for the testing of integrated optical devices

Franco Quercioli; Bruno Tiribilli; Massimo Vassalli; A. Ghirelli; Giancarlo C. Righini; Stefano Pelli; Marco Cremona

doi:10.1117/12.527040

19 November 2003 Confocal microscopy for the testing of integrated optical devices

Franco Quercioli, Bruno Tiribilli, Massimo Vassalli, A. Ghirelli, Giancarlo C. Righini, Stefano Pelli, Marco Cremona

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.527040
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

Planar waveguides have been realized in lithium fluoride crystals by ion-beam irradiation. Ion bombardment produces color centers in the LiF crystal, increasing locally the refractive index. Confocal microscopy is applied to the characterization of the waveguides in order to assess the uniformity and distribution of color centers through the measurement of the photoluminescence emission.

Citation Download Citation

Franco Quercioli, Bruno Tiribilli, Massimo Vassalli, A. Ghirelli, Giancarlo C. Righini, Stefano Pelli, and Marco Cremona "Confocal microscopy for the testing of integrated optical devices", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.527040

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