Translator Disclaimer
Paper
19 November 2003 Micro-fabricated spectral analysers
Author Affiliations +
Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.530940
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy
Abstract
We present several devices using different spectroscopic concepts. First, we show the successive steps and improvements in connection with the Michelson interferometer which we have already realized, in particular the use of fibers to bring in and collimate the light. A possible method to obtain micro-optical elements that are suitable for integration on the interferometer chip is proposed. Then, we present a lamellar grating interferometer, an array of commutable slits to realize a Hadamard transformer, and a movable curved diffraction grating. All of these devices have been realized by silicon micro-machining, more particularly with silicon-on-insulator (SOI) technology.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Omar Manzardo, Yves Petremand, Hans-Peter Herzig, Wilfried Noell, and Nico F. de Rooij "Micro-fabricated spectral analysers", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.530940
PROCEEDINGS
3 PAGES


SHARE
Advertisement
Advertisement
Back to Top