Crystalization of sol-gel-derived precursor zinc oxide film during KrF excimer laser irradiation

Kazuyuki Hayashi; Toshihiko Ooie; Toshimi Nagase; Tatsuya Shinozaki; Takao Araki

doi:10.1117/12.499712

19 February 2003 Crystalization of sol-gel derived precursor zinc oxide file during KrF excimer laser irradiation

Kazuyuki Hayashi, Toshihiko Ooie, Toshimi Nagase, Tatsuya Shinozaki, Takao Araki

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.499712
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

The present paper describes a study on the crystallization of a sol-gel derived precursor ZnO film during and after the irradiation of an excimer laser. The temporal change of the structure of ZnO films was discussed based on the time-resolved signal of a reflected and a transmitted laser beam during the excimer laser irradiation. The surface morphology of the films was analyzed by atomic force microscope (AFM). The pulse-to-pulse changes of integrated signals reflected the surface conditions of the ZnO film. In time-resolved measurement, significant changes of both signals were observed during the first pulse.

Citation Download Citation

Kazuyuki Hayashi, Toshihiko Ooie, Toshimi Nagase, Tatsuya Shinozaki, and Takao Araki "Crystalization of sol-gel derived precursor zinc oxide file during KrF excimer laser irradiation", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.499712

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