Diagnostics of particle dynamics during deposition of optically functional thin films by laser ablation

Tatsuo Okada; Yoshiki Nakata; Mitsuo Maeda

doi:10.1117/12.486536

19 February 2003 Diagnostics of particle dynamics during deposition of optically functional thin films by laser ablation

Tatsuo Okada, Yoshiki Nakata, Mitsuo Maeda

Author Affiliations +

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486536
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

We describe the diagnostics of the particle dynamics during thin film deposition and the nano-particle formation by pulsed laser ablation in a background gas. Oxidation process during the deposition of the Ce-substituted yttrium iron garnet thin films in an oxygen background gas has been investigated by the laser-induced fluorescence spectroscopy (LIF) and the ZnO nano-particle formation process has been observed by the Rayleigh scattering imaging, in order to understand the relationship between the deposition conditions and the film properties. Furthermore, in order to investigate the earlier stage of the nano-particle formation process in the ablation plume, a new imaging technique, named as re-decomposition LIF (ReD-LIF) was proposed and its signal characteristics were investigated theoretically and experimentally. It was proved that ReD-LIF can visualized the small clusters, which are difficult to be visualized by any other methods.

Citation Download Citation

Tatsuo Okada, Yoshiki Nakata, and Mitsuo Maeda "Diagnostics of particle dynamics during deposition of optically functional thin films by laser ablation", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486536

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