Enhancement of debris attachment and atomic redistribution of femtosecond laser ablation using phase-shifted Gaussian beams

Hiroki Murata; Masanori Miyazawa; Koichi Toyoda

doi:10.1117/12.486520

19 February 2003 Enhancement of debris attachment and atomic redistribution of femtosecond laser ablation using phase-shifted Gaussian beams

Hiroki Murata, Masanori Miyazawa, Koichi Toyoda

Author Affiliations +

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486520
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Femtosecond laser ablation using phase-shifted laser beam is reported. Phase-shifting method is a unique method to modify the Gaussian intensity profile into closely adjacent pair of the high intensity peaks. The phase-shifting was accomplished by the use of reflecting plane-mirror whose plane has a step of quarter of the wavelength. The calculation of intensity profiles using Fresnel diffraction theory shows a steep intensity changes in a very closed area. In the experiment of femtosecond laser ablation using phase-shifted beams, debris attachment has been observed both surround area and the central part corresponding to the phase edge. We discuss the anomalous enhancement of debris attachment at the central part.

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Hiroki Murata, Masanori Miyazawa, and Koichi Toyoda "Enhancement of debris attachment and atomic redistribution of femtosecond laser ablation using phase-shifted Gaussian beams", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486520

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