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19 February 2003 How to sensitively measure the rate of neutral free radical production by photo-deionization of negative ion beams
Keiji Hayashi, Hiroshi Konno, Hideki Kojima, Makoto Minato, Takashi Oseki, Yasunori Kawamura, Kenji Kameko, Takuo Kanayama
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486564
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
Abstract
Two measurement methods to determine the rate of neutral free radical production by the photo-deionization of negative ion beams ( PDINIB ) are introduced. These methods, namely, photoelectron-current measurement by low-frequency electro-modulation probe ( PMMP ) and measurement of decrease in the negative-ion beam current ( DNIC ) were employed to evaluate the production rate in a trail surface-processing apparatus developed in the author’s laboratory utilizing a steady-flux refined beam of neutral free radicals produced by the PDINIB procedure. A 63Cu- negative ion beam of kinetic energy Ei varied up to 15 keV was irradiated with a 514.5 nm visible light beam from a 25 W CW Ar+ ion laser. The detection limit of the production rate by the PMMP setup was as high as 6×109/s under the condition that Ei = 15keV, the negative ion beam current Ii = 4 μA, and the laser power P = 6W. The DNIC method is simpler but less reliable than the PMMP method owing to larger uncertainty resulting from the fluctuation of the negative-ion beam current.
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Keiji Hayashi, Hiroshi Konno, Hideki Kojima, Makoto Minato, Takashi Oseki, Yasunori Kawamura, Kenji Kameko, and Takuo Kanayama "How to sensitively measure the rate of neutral free radical production by photo-deionization of negative ion beams", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486564
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KEYWORDS
Ion beams
Ions
Electrons
Continuous wave operation
Ion lasers
Particles
Visible radiation
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