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19 February 2003 Microprocessing using UV solid-state laser systems with high repetition rate
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Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486508
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan
Abstract
In this paper investigation of using frequency-converted diode-pumped solid-state laser for substituting conventional industrial machining processes like in the MST is presented. For industrial application a decreasing of the processing time is demanded. This study shows that the pulse energy of current available DPSS lasers is nearly sufficient to meet the demands for industrial laser cutting and selective ablation processes.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas Ostendorf, Klaus Koerber, Christian Kulik, and Frank Otte "Microprocessing using UV solid-state laser systems with high repetition rate", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486508
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