Optical properties of N-doped diamond-like carbon films synthesized by pulsed-laser deposition

Zhi Ying Chen; Jian Ping Zhao; Tatsuya Shinozaki; Toshihiko Ooie; Tetsuo Yano

doi:10.1117/12.486524

19 February 2003 Optical properties of N-doped diamond-like carbon films synthesized by pulsed laser deposition

Zhi Ying Chen, Jian Ping Zhao, Tatsuya Shinozaki, Toshihiko Ooie, Tetsuo Yano

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486524
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Optical properties of nitrogen-doped diamond-like carbon films deposited by pulsed laser deposition at room temperature are investigated. Three series of diamond-like carbon films are prepared by KrF excimer laser ablation of graphite with assistance of different nitrogen sources. Series 1: nitrogen gas of 99.999% purity is applied to react with carbon species. Diamond-like carbon films with nitrogen content of ~0.5-1.7 at.% are prepared at different nitrogen gas pressures (10^-4-10^-1Pa). Series 2: a radical beam source is used for providing an atomic nitrogen beam. Diamond-like carbon films with nitrogen content of ~1.0-5.4 at.% are synthesized at nitrogen gas pressure of 10^-3-10^-2Pa. Series 3: a 3-cm ion source is employed for supplying an active nitrogen ion beam. Diamond-like carbon films with nitrogen content varying from 8.0 to 14.3 at.% are deposited. The optical properties of the synthesized diamond-like carbon films are characterized by ultraviolet-visible spectrometry. Investigation indicates that the different nitrogen sources have different effects on the optical properties of diamond-like carbon films.

Citation Download Citation

Zhi Ying Chen, Jian Ping Zhao, Tatsuya Shinozaki, Toshihiko Ooie, and Tetsuo Yano "Optical properties of N-doped diamond-like carbon films synthesized by pulsed laser deposition", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486524

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